Dry Isotropic etching of Silicon

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Dry Isotropic etching of Silicon using Xenon Di-fluoride for MEMS and other applications
dry-isotropic-etching-of-silicon

Highly selective Dry Isotropic Etching system using Xenon Di-fluoride (XeF2) for MEMS & other applications

  • Low cost xenon difluoride dry isotropic etch system for R & D customers: Xetch e2 series
  • Advanced R&D through pilot production xenon difluoride dry isotropic etch system: Xetch X4 series
  • CVE Module for high volume production: CVE Module

For more details, please Contact MCube Technologies

Systems and Equipments